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Excimer Laser Technology

Overview of attention for book
Cover of 'Excimer Laser Technology'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Introductory Remarks
  3. Altmetric Badge
    Chapter 2 Historical Review of Excimer Laser Development
  4. Altmetric Badge
    Chapter 3 Trends in Worldwide Excimer Laser Sales
  5. Altmetric Badge
    Chapter 4 Some Fundamentals of Laser Physics
  6. Altmetric Badge
    Chapter 5 Principles of Excimer Lasers
  7. Altmetric Badge
    Chapter 6 Design and Technology of Excimer Lasers
  8. Altmetric Badge
    Chapter 7 High-Repetition-Rate and High-Power Lasers
  9. Altmetric Badge
    Chapter 8 High-Energy Lasers
  10. Altmetric Badge
    Chapter 9 Excimer Lasers for Microlithography
  11. Altmetric Badge
    Chapter 10 Laser Beam Characterization
  12. Altmetric Badge
    Chapter 11 Optical Coatings for Excimer Laser Applications
  13. Altmetric Badge
    Chapter 12 Small Structures with Large Excimer Lasers
  14. Altmetric Badge
    Chapter 13 Overview
  15. Altmetric Badge
    Chapter 14 Ablation
  16. Altmetric Badge
    Chapter 15 Micro-Machining
  17. Altmetric Badge
    Chapter 16 Via Drilling
  18. Altmetric Badge
    Chapter 17 Micro-Processing of Borosilicate Glass and Polymers
  19. Altmetric Badge
    Chapter 18 F 2 -Laser Microfabrication for Photonics and Biophotonics
  20. Altmetric Badge
    Chapter 19 Nano-Structuring with Femtosecond Excimer Laser Pulses
  21. Altmetric Badge
    Chapter 20 Physical Aspects of Ultra-Fast UV Laser Transfer
  22. Altmetric Badge
    Chapter 21 Microlithography
  23. Altmetric Badge
    Chapter 22 TFT Annealing
  24. Altmetric Badge
    Chapter 23 Fiber Bragg Gratings
  25. Altmetric Badge
    Chapter 24 Marking
  26. Altmetric Badge
    Chapter 25 Activation and Metallization of Dielectrics
  27. Altmetric Badge
    Chapter 26 Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films
  28. Altmetric Badge
    Chapter 27 Combustion Analysis
  29. Altmetric Badge
    Chapter 28 Medical Applications of Excimer Lasers
  30. Altmetric Badge
    Chapter 29 High-Intensity Applications of Excimer Lasers
  31. Altmetric Badge
    Chapter 30 High-Repetition-Rate Applications of Excimer Lasers
  32. Altmetric Badge
    Chapter 31 New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm
Overall attention for this book and its chapters
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About this Attention Score

  • Good Attention Score compared to outputs of the same age (74th percentile)
  • Good Attention Score compared to outputs of the same age and source (73rd percentile)

Mentioned by

wikipedia
11 Wikipedia pages
video
1 YouTube creator

Citations

dimensions_citation
94 Dimensions

Readers on

mendeley
194 Mendeley
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Title
Excimer Laser Technology
Published by
ADS, December 2005
DOI 10.1007/b137894
ISBNs
978-3-54-026667-9, 978-3-54-020056-7
Authors

Basting, Dirk, Marowsky, Gerd

Editors

Basting, Dirk, Marowsky, Gerd

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 194 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
United Kingdom 2 1%
Germany 1 <1%
Iran, Islamic Republic of 1 <1%
Belgium 1 <1%
Korea, Republic of 1 <1%
Greece 1 <1%
United States 1 <1%
Poland 1 <1%
Unknown 185 95%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 48 25%
Researcher 32 16%
Student > Master 26 13%
Student > Bachelor 20 10%
Student > Doctoral Student 10 5%
Other 27 14%
Unknown 31 16%
Readers by discipline Count As %
Physics and Astronomy 75 39%
Engineering 43 22%
Chemistry 13 7%
Materials Science 8 4%
Agricultural and Biological Sciences 4 2%
Other 12 6%
Unknown 39 20%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 4. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 13 November 2023.
All research outputs
#7,277,054
of 22,959,818 outputs
Outputs from ADS
#9,052
of 37,392 outputs
Outputs of similar age
#37,437
of 147,360 outputs
Outputs of similar age from ADS
#74
of 301 outputs
Altmetric has tracked 22,959,818 research outputs across all sources so far. This one has received more attention than most of these and is in the 67th percentile.
So far Altmetric has tracked 37,392 research outputs from this source. They receive a mean Attention Score of 4.6. This one has done well, scoring higher than 75% of its peers.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 147,360 tracked outputs that were published within six weeks on either side of this one in any source. This one has gotten more attention than average, scoring higher than 74% of its contemporaries.
We're also able to compare this research output to 301 others from the same source and published within six weeks on either side of this one. This one has gotten more attention than average, scoring higher than 73% of its contemporaries.