| Title |
Hierarchical indices to detect equipment condition changes with high dimensional data for semiconductor manufacturing
|
|---|---|
| Published in |
Journal of Intelligent Manufacturing, May 2013
|
| DOI | 10.1007/s10845-013-0785-3 |
| Authors |
Hui-Chun Yu, Kuo-Yi Lin, Chen-Fu Chien |
Mendeley readers
The data shown below were compiled from readership statistics for 15 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Korea, Republic of | 1 | 7% |
| Unknown | 14 | 93% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 5 | 33% |
| Student > Doctoral Student | 2 | 13% |
| Researcher | 2 | 13% |
| Professor | 1 | 7% |
| Student > Bachelor | 1 | 7% |
| Other | 0 | 0% |
| Unknown | 4 | 27% |
| Readers by discipline | Count | As % |
|---|---|---|
| Engineering | 6 | 40% |
| Computer Science | 1 | 7% |
| Chemical Engineering | 1 | 7% |
| Materials Science | 1 | 7% |
| Decision Sciences | 1 | 7% |
| Other | 0 | 0% |
| Unknown | 5 | 33% |
Attention Score in Context
This research output has an Altmetric Attention Score of 1. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 25 November 2014.
All research outputs
#20,243,777
of 22,771,140 outputs
Outputs from Journal of Intelligent Manufacturing
#393
of 552 outputs
Outputs of similar age
#171,473
of 196,633 outputs
Outputs of similar age from Journal of Intelligent Manufacturing
#7
of 7 outputs
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So far Altmetric has tracked 552 research outputs from this source. They receive a mean Attention Score of 1.5. This one is in the 1st percentile – i.e., 1% of its peers scored the same or lower than it.
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We're also able to compare this research output to 7 others from the same source and published within six weeks on either side of this one.