| Title |
Wafer-scale integrated micro-supercapacitors on an ultrathin and highly flexible biomedical platform
|
|---|---|
| Published in |
Biomedical Microdevices, January 2015
|
| DOI | 10.1007/s10544-015-9930-4 |
| Pubmed ID | |
| Authors |
Jimin Maeng, Chuizhou Meng, Pedro P. Irazoqui |
| Abstract |
We present wafer-scale integrated micro-supercapacitors on an ultrathin and highly flexible parylene platform, as progress toward sustainably powering biomedical microsystems suitable for implantable and wearable applications. All-solid-state, low-profile (<30 μm), and high-density (up to ~500 μF/mm(2)) micro-supercapacitors are formed on an ultrathin (~20 μm) freestanding parylene film by a wafer-scale parylene packaging process in combination with a polyaniline (PANI) nanowire growth technique assisted by surface plasma treatment. These micro-supercapacitors are highly flexible and shown to be resilient toward flexural stress. Further, direct integration of micro-supercapacitors into a radio frequency (RF) rectifying circuit is achieved on a single parylene platform, yielding a complete RF energy harvesting microsystem. The system discharging rate is shown to improve by ~17 times in the presence of the integrated micro-supercapacitors. This result suggests that the integrated micro-supercapacitor technology described herein is a promising strategy for sustainably powering biomedical microsystems dedicated to implantable and wearable applications. |
X Demographics
The data shown below were collected from the profile of 1 X user who shared this research output. Click here to find out more about how the information was compiled.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 1 | 100% |
Demographic breakdown
| Type | Count | As % |
|---|---|---|
| Members of the public | 1 | 100% |
Mendeley readers
The data shown below were compiled from readership statistics for 35 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Iran, Islamic Republic of | 1 | 3% |
| United States | 1 | 3% |
| Belgium | 1 | 3% |
| Unknown | 32 | 91% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 14 | 40% |
| Student > Master | 7 | 20% |
| Researcher | 5 | 14% |
| Student > Doctoral Student | 2 | 6% |
| Student > Bachelor | 2 | 6% |
| Other | 3 | 9% |
| Unknown | 2 | 6% |
| Readers by discipline | Count | As % |
|---|---|---|
| Engineering | 15 | 43% |
| Materials Science | 5 | 14% |
| Chemistry | 2 | 6% |
| Energy | 2 | 6% |
| Medicine and Dentistry | 1 | 3% |
| Other | 3 | 9% |
| Unknown | 7 | 20% |
Attention Score in Context
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All research outputs
#15,325,572
of 22,793,427 outputs
Outputs from Biomedical Microdevices
#554
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Outputs of similar age
#209,991
of 353,032 outputs
Outputs of similar age from Biomedical Microdevices
#10
of 20 outputs
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