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X Demographics
Mendeley readers
| Title |
Electrodeposition of Gold to Conformally Fill High-Aspect-Ratio Nanometric Silicon Grating Trenches: A Comparison of Pulsed and Direct Current Protocols
|
|---|---|
| Published in |
Journal of Surface Engineered Materials and Advanced Technology, October 2015
|
| DOI | 10.4236/jsemat.2015.54022 |
| Pubmed ID | |
| Authors |
Sami A. Znati, Nicholas Chedid, Houxun Miao, Lei Chen, Eric E. Bennett, Han Wen |
| Abstract |
Filling high-aspect-ratio trenches with gold is a frequent requirement in the fabrication of x-ray optics as well as micro-electronic components and other fabrication processes. Conformal electrodeposition of gold in sub-micron-width silicon trenches with an aspect ratio greater than 35 over a grating area of several square centimeters is challenging and has not been described in the literature previously. A comparison of pulsed plating and constant current plating led to a gold electroplating protocol that reliably filled trenches for such structures. |
X Demographics
The data shown below were collected from the profile of 1 X user who shared this research output. Click here to find out more about how the information was compiled.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 1 | 100% |
Demographic breakdown
| Type | Count | As % |
|---|---|---|
| Members of the public | 1 | 100% |
Mendeley readers
The data shown below were compiled from readership statistics for 28 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 28 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 14 | 50% |
| Researcher | 3 | 11% |
| Student > Doctoral Student | 2 | 7% |
| Student > Bachelor | 1 | 4% |
| Professor | 1 | 4% |
| Other | 3 | 11% |
| Unknown | 4 | 14% |
| Readers by discipline | Count | As % |
|---|---|---|
| Materials Science | 9 | 32% |
| Physics and Astronomy | 5 | 18% |
| Engineering | 5 | 18% |
| Energy | 1 | 4% |
| Chemistry | 1 | 4% |
| Other | 1 | 4% |
| Unknown | 6 | 21% |