Immersion defect reduction, part I: analysis of water leaks in an immersion scanner

Overview of attention for article published in Proceedings of SPIE, March 2007

Altmetric Badge

About this Attention Score

Above-average Attention Score compared to outputs of the same age (64th percentile)
Good Attention Score compared to outputs of the same age and source (67th percentile)

Mentioned by

patent: 6 patents

Readers on

mendeley: 8 Mendeley

So far, Altmetric has seen 6 patents that reference this research output.

METHOD OF MONITORING PERFORMANCE, METHOD OF MANUFACTURING DEVICES, COMPUTER PROGRAM AND…

Application WO-2025078098-A1

World Intellectual Property Organisation (WIPO)

17 Apr 2025

Device manufacturing method and computer program

Grant US-11372339-B1

United States of America

28 Jun 2022

Method of performance testing working parameters of a fluid handling structure and a…

Grant US-11143969-B2

United States of America

12 Oct 2021

DEVICE MANUFACTURING METHOD AND COMPUTER PROGRAM

Application WO-2020212001-A1

World Intellectual Property Organisation (WIPO)

22 Oct 2020

This page shows the most recent patents that mention this research output. Click here to find out how to access more activity, including 2 additional patents.