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Reactive ion etching of quartz and Pyrex for microelectronic applications

Overview of attention for article published in Journal of Applied Physics, October 2002
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Mentioned by

patent
6 patents

Readers on

mendeley
58 Mendeley
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Article details
Title
Reactive ion etching of quartz and Pyrex for microelectronic applications
Published in
Journal of Applied Physics, October 2002
DOI 10.1063/1.1503167
Authors

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Timeline Attention over time Attention Score history
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Activity
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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 58 Mendeley readers of this research output. Click here to see the associated Mendeley record.
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Geographical breakdown

Geographical breakdown
Country Count As %
United States 2 3%
Sweden 1 2%
Japan 1 2%
United Kingdom 1 2%
China 1 2%
Unknown 52 90%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Researcher 13 22%
Student > Ph. D. Student 12 21%
Student > Master 7 12%
Student > Bachelor 6 10%
Other 2 3%
Other 8 14%
Unknown 10 17%
Readers by discipline
Readers by discipline Count As %
Engineering 22 38%
Physics and Astronomy 9 16%
Materials Science 8 14%
Chemistry 4 7%
Chemical Engineering 1 2%
Other 2 3%
Unknown 12 21%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 05 September 2023.
All research outputs
#8,535,684
of 25,377,790 outputs
Outputs from Journal of Applied Physics
#3,818
of 21,680 outputs
Outputs of similar age
#17,268
of 49,680 outputs
Outputs of similar age from Journal of Applied Physics
#33
of 129 outputs
Altmetric has tracked 25,377,790 research outputs across all sources so far. This one is in the 43rd percentile – i.e., 43% of other outputs scored the same or lower than it.
So far Altmetric has tracked 21,680 research outputs from this source. They receive a mean Attention Score of 3.7. This one is in the 35th percentile – i.e., 35% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 49,680 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 11th percentile – i.e., 11% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 129 others from the same source and published within six weeks on either side of this one. This one is in the 4th percentile – i.e., 4% of its contemporaries scored the same or lower than it.