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Optical Lithography

Overview of attention for book
Optical Lithography
SPIE
Overall attention for this book and its chapters
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Mentioned by

wikipedia
4 Wikipedia pages

Readers on

mendeley
61 Mendeley
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Article details
Title
Optical Lithography
Published by
SPIE, January 2010
DOI 10.1117/3.821000
ISBNs
978-0-8194-7560-2
Authors

Burn J. Lin

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Timeline Attention over time Attention Score history
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Activity
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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 61 Mendeley readers of this research output. Click here to see the associated Mendeley record.
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Geographical breakdown

Geographical breakdown
Country Count As %
United States 1 2%
Iran, Islamic Republic of 1 2%
China 1 2%
Unknown 58 95%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Student > Ph. D. Student 15 25%
Student > Master 14 23%
Researcher 5 8%
Student > Bachelor 4 7%
Student > Doctoral Student 2 3%
Other 2 3%
Unknown 19 31%
Readers by discipline
Readers by discipline Count As %
Physics and Astronomy 18 30%
Engineering 10 16%
Materials Science 6 10%
Chemistry 3 5%
Agricultural and Biological Sciences 2 3%
Other 3 5%
Unknown 19 31%