Optical Lithography
SPIE
| Title |
Optical Lithography
|
|---|---|
| Published by |
SPIE, January 2010
|
| DOI | 10.1117/3.821000 |
| ISBNs |
978-0-8194-7560-2
|
| Authors |
Burn J. Lin |
| Country | Count | As % |
|---|---|---|
| United States | 1 | 2% |
| Iran, Islamic Republic of | 1 | 2% |
| China | 1 | 2% |
| Unknown | 58 | 95% |
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 15 | 25% |
| Student > Master | 14 | 23% |
| Researcher | 5 | 8% |
| Student > Bachelor | 4 | 7% |
| Student > Doctoral Student | 2 | 3% |
| Other | 2 | 3% |
| Unknown | 19 | 31% |
| Readers by discipline | Count | As % |
|---|---|---|
| Physics and Astronomy | 18 | 30% |
| Engineering | 10 | 16% |
| Materials Science | 6 | 10% |
| Chemistry | 3 | 5% |
| Agricultural and Biological Sciences | 2 | 3% |
| Other | 3 | 5% |
| Unknown | 19 | 31% |