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The future of subhalf-micrometer optical lithography

Overview of attention for article published in Microelectronic Engineering, December 1987
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About this Attention Score

  • Good Attention Score compared to outputs of the same age (78th percentile)
  • Good Attention Score compared to outputs of the same age and source (79th percentile)

Mentioned by

twitter
2 X users
wikipedia
3 Wikipedia pages

Readers on

mendeley
26 Mendeley
So far, Altmetric has seen 3 citations on 3 Wikipedia pages.
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