Implementation of a Monolithic Single Proof-Mass Tri-Axis Accelerometer Using CMOS-MEMS Technique

Overview of attention for article published in IEEE Transactions on Electron Devices, May 2010

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patent: 6 patents

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So far, Altmetric has seen 6 patents that reference this research output.

Low-noise multi-axis accelerometers and related methods

Grant US-12146893-B2

United States of America

19 Nov 2024

Triaxial accelerometer and sensing device

Application CN-117031069-A

China

10 Nov 2023

3-axis accelerometer

Grant US-11733263-B2

United States of America

22 Aug 2023

Low-noise multi-axis accelerometers and related methods

Grant US-11099207-B2

United States of America

24 Aug 2021

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