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| Title |
ナノトランスファー法を用いた強誘電体膜の剥離特性
|
|---|---|
| Published by |
一般社団法人エレクトロニクス実装学会, July 2014
|
| DOI | 10.11486/ejisso.24.0_228 |
| Authors |
飯村 慶太, 細野 智史, 一木 正聡, 伊藤 寿浩, 須賀 唯知 |