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Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device

Overview of attention for article published in Journal of Microelectromechanical Systems, October 2022
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Title
Nanometer Order Separation Control of Large Working Area Nanogap Created by Cleavage of Single-Crystal Silicon Along {111} Planes Using a MEMS Device
Published in
Journal of Microelectromechanical Systems, October 2022
DOI 10.1109/jmems.2022.3213999
Authors

Masaki Shimofuri, Amit Banerjee, Jun Hirotani, Yoshikazu Hirai, Toshiyuki Tsuchiya

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Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 1. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 23 October 2022.
All research outputs
#17,301,727
of 25,392,582 outputs
Outputs from Journal of Microelectromechanical Systems
#1,349
of 1,393 outputs
Outputs of similar age
#256,895
of 442,715 outputs
Outputs of similar age from Journal of Microelectromechanical Systems
#1
of 2 outputs
Altmetric has tracked 25,392,582 research outputs across all sources so far. This one is in the 21st percentile – i.e., 21% of other outputs scored the same or lower than it.
So far Altmetric has tracked 1,393 research outputs from this source. They receive a mean Attention Score of 4.8. This one is in the 2nd percentile – i.e., 2% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 442,715 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 30th percentile – i.e., 30% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 2 others from the same source and published within six weeks on either side of this one. This one has scored higher than all of them