An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

Overview of attention for article published in Sensors & Actuators A: Physical, February 2015

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High Attention Score compared to outputs of the same age (84th percentile)
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patent: 5 patents

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mendeley: 57 Mendeley

So far, Altmetric has seen 5 patents that reference this research output.

Position sensing circuit for an electrostatically driven MEMS device

Grant US-11820649-B2

United States of America

21 Nov 2023

Capacitive charge based self-sensing and position observer for electrostatic MEMS mirrors

Grant US-11782263-B2

United States of America

10 Oct 2023

Capacitive charge based self-sensing and position observer for electrostatic MEMS mirrors

Grant US-11467394-B2

United States of America

11 Oct 2022

MICROSYSTEM AND METHOD FOR PRODUCING SAME

Application WO-2021028345-A2

World Intellectual Property Organisation (WIPO)

18 Feb 2021

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