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Development of a proximity sensor with vertically monolithic integrated inductive and capacitive sensing units

Overview of attention for article published in Journal of Micromechanics & Microengineering, January 2013
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About this Attention Score

  • In the top 25% of all research outputs scored by Altmetric
  • High Attention Score compared to outputs of the same age (89th percentile)
  • High Attention Score compared to outputs of the same age and source (94th percentile)

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