Ozone-Based Atomic Layer Deposition of Crystalline V2O5 Films for High Performance Electrochemical Energy Storage

Overview of attention for article published in Chemistry of Materials, March 2012

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So far, Altmetric has seen 16 patents that reference this research output.

Method for manufacturing capacitor with low leakage current and high capacitance using…

Grant KR-102674344-B1

Republic of Korea

11 Jun 2024

Method for manufacturing capacitor with low leakage current and high capacitance using…

Application KR-20240046967-A

Republic of Korea

12 Apr 2024

Selective deposition using hydrolysis

Grant US-11404275-B2

United States of America

02 Aug 2022

Selective deposition with atomic layer etch reset

Grant US-10998187-B2

United States of America

04 May 2021

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