A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation

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Title	A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation
Published by	Institute of Electrical and Electronics Engineers (IEEE), April 2023
DOI	10.1109/isqed57927.2023.10129375
Authors	Hsin-Ping Yen, Shiuan-Hau Huang, Yan-Hsiu Liu, Kuang-Hsien Tseng, Ji-Fu Kung, Yi-Ting Li, Yung-Chih Chen, Chun-Yao Wang

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