New Hafnium Clusters Revolutionize EUV Lithography | Science Featured Series
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The rapidly evolving world of technology demands the creation of incredibly small and precise electronic components.
Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses
Overview of attention for article published in Nanoscale Advances, January 2024
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In the top 25% of all research outputs scored by Altmetric
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