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4-nm thick multilayer structure of multi-component (AlCrRuTaTiZr)Nx as robust diffusion barrier for Cu interconnects

Overview of attention for article published in Journal of Alloys & Compounds, February 2012
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Mentioned by

patent
1 patent

Readers on

mendeley
79 Mendeley
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Article details
Title
4-nm thick multilayer structure of multi-component (AlCrRuTaTiZr)Nx as robust diffusion barrier for Cu interconnects
Published in
Journal of Alloys & Compounds, February 2012
DOI 10.1016/j.jallcom.2011.11.082
Authors

Shou-Yi Chang, Chen-En Li, Sheng-Cheng Chiang, Yi-Chung Huang

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Timeline Attention over time Attention Score history
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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 79 Mendeley readers of this research output. Click here to see the associated Mendeley record.
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Geographical breakdown

Geographical breakdown
Country Count As %
India 2 3%
Germany 1 1%
Austria 1 1%
Unknown 75 95%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Student > Ph. D. Student 14 18%
Student > Master 11 14%
Researcher 10 13%
Other 5 6%
Professor > Associate Professor 5 6%
Other 13 16%
Unknown 21 27%
Readers by discipline
Readers by discipline Count As %
Materials Science 28 35%
Engineering 10 13%
Physics and Astronomy 4 5%
Arts and Humanities 1 1%
Nursing and Health Professions 1 1%
Other 2 3%
Unknown 33 42%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 07 May 2024.
All research outputs
#12,344,681
of 34,362,729 outputs
Outputs from Journal of Alloys & Compounds
#2,330
of 13,293 outputs
Outputs of similar age
#102,353
of 305,868 outputs
Outputs of similar age from Journal of Alloys & Compounds
#21
of 80 outputs
Altmetric has tracked 34,362,729 research outputs across all sources so far. This one is in the 38th percentile – i.e., 38% of other outputs scored the same or lower than it.
So far Altmetric has tracked 13,293 research outputs from this source. They receive a mean Attention Score of 3.2. This one is in the 25th percentile – i.e., 25% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 305,868 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 30th percentile – i.e., 30% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 80 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.