Low-frequency noise measurement of copper damascene interconnects

Overview of attention for article published in this source, January 2000

Altmetric Badge

Mentioned by

patent: 1 patent

Readers on

mendeley: 3 Mendeley

So far, Altmetric has seen 1 patent that references this research output.

Method of fabricating semiconductor device, and semiconductor device

Grant US-6713847-B1

United States of America

This page shows the most recent patents that mention this research output. Click here to find out how to access more activity.