Methods of etching trenches into silicon of a semiconductor substrate Grant US-9524875-B2 United States of America 20 Dec 2016
Methods of etching trenches into silicon of a semiconductor substrate, methods of forming… Grant US-8802573-B2 United States of America 12 Aug 2014
Methods of etching trenches into silicon of a semiconductor substrate, methods of forming… Grant US-8252658-B2 United States of America 28 Aug 2012
Methods of forming trench isolation in silicon of a semiconductor substrate by plasma Grant US-7704849-B2 United States of America 27 Apr 2010