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Optimal sampling strategies for sub-100-nm overlay

Overview of attention for article published in Proceedings of SPIE, June 1998
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Article details
Title
Optimal sampling strategies for sub-100-nm overlay
Published in
Proceedings of SPIE, June 1998
DOI 10.1117/12.308743
Authors

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Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 22 October 2019.
All research outputs
#12,425,541
of 34,517,289 outputs
Outputs from Proceedings of SPIE
#17,348
of 60,598 outputs
Outputs of similar age
#21,012
of 49,164 outputs
Outputs of similar age from Proceedings of SPIE
#153
of 582 outputs
Altmetric has tracked 34,517,289 research outputs across all sources so far. This one is in the 37th percentile – i.e., 37% of other outputs scored the same or lower than it.
So far Altmetric has tracked 60,598 research outputs from this source. They receive a mean Attention Score of 4.2. This one is in the 6th percentile – i.e., 6% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 49,164 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 7th percentile – i.e., 7% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 582 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.