Optimal sampling strategies for sub-100-nm overlay

Overview of attention for article published in Proceedings of SPIE, June 1998

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patent: 27 patents

So far, Altmetric has seen 27 patents that reference this research output.

Apparatus and methods for detecting overlay errors using scatterometry

Grant US-10451412-B2

United States of America

Periodic patterns and technique to control misalignment between two layers

Grant US-10151584-B2

United States of America

Periodic patterns and technique to control misalignment between two layers

Grant US-9835447-B2

United States of America

Apparatus for measuring overlay errors

Grant US-9702693-B2

United States of America

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