Plasma enhanced chemical vapor deposition of films for improved vertical etch performance… Grant US-11365476-B2 United States of America 21 Jun 2022
Plasma enhanced chemical vapor deposition of films for improved vertical etch performance… Grant US-10246772-B2 United States of America 02 Apr 2019
Nonvolatile semiconductor memory device, semiconductor device and manufacturing method of… Grant US-8093126-B2 United States of America 10 Jan 2012
Nonvolatile semiconductor memory device, semiconductor device and manufacturing method of… Grant US-7883967-B2 United States of America 08 Feb 2011