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90-nm lithography process characterization using ODP scatterometry technology

Overview of attention for article published in Proceedings of SPIE, May 2004
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1 patent

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10 Mendeley
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Article details
Title
90-nm lithography process characterization using ODP scatterometry technology
Published in
Proceedings of SPIE, May 2004
DOI 10.1117/12.536123
Authors

Chih-Ming Ke, Shinn-Sheng Yu, Yu-Hsi Wang, Yu-Jun Chou, Jeng-Horng Chen, Bih-Huey Lee, Hong-Yuan Chu, Hua-Tai Lin, Tsai-Sheng Gau, Chih-Hsiang Lin, Yao-Ching Ku, Burn J. Lin, Jacky Huang, J. J. Hsu, Victor Liu, Dave Hetzer, Lip Yap, Wenge Yang, Kaoru Araki

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Timeline Attention over time Attention Score history
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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 10 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Geographical breakdown
Country Count As %
Belgium 1 10%
Unknown 9 90%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Student > Ph. D. Student 4 40%
Researcher 3 30%
Professor > Associate Professor 1 10%
Student > Postgraduate 1 10%
Unknown 1 10%
Readers by discipline
Readers by discipline Count As %
Chemistry 6 60%
Physics and Astronomy 1 10%
Materials Science 1 10%
Engineering 1 10%
Unknown 1 10%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 01 March 2011.
All research outputs
#12,344,996
of 34,363,559 outputs
Outputs from Proceedings of SPIE
#17,326
of 60,460 outputs
Outputs of similar age
#36,969
of 88,841 outputs
Outputs of similar age from Proceedings of SPIE
#319
of 859 outputs
Altmetric has tracked 34,363,559 research outputs across all sources so far. This one is in the 38th percentile – i.e., 38% of other outputs scored the same or lower than it.
So far Altmetric has tracked 60,460 research outputs from this source. They receive a mean Attention Score of 4.2. This one is in the 6th percentile – i.e., 6% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 88,841 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 9th percentile – i.e., 9% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 859 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.