Implementation of a gap-closing differential capacitive sensing Z-axis accelerometer on an SOI wafer

Overview of attention for article published in Journal of Micromechanics & Microengineering, June 2009

Altmetric Badge

Mentioned by

patent: 2 patents

Readers on

mendeley: 22 Mendeley

So far, Altmetric has seen 2 patents that reference this research output.

MEMS device with differential vertical sense electrodes

Grant US-9346670-B2

United States of America

MEMS device with differential vertical sense electrodes

Grant US-9242851-B2

United States of America

This page shows the most recent patents that mention this research output. Click here to find out how to access more activity.