The CMOS-MEMS 3-Axis Capacitive Accelerometer to Meet the Commercial Specifications

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MEMS pressure sensor built using the beol metal layers of a solid-state semiconductor…

Grant US-12703621-B2

United States of America

MEMS device built using the BEOL metal layers of a solid state semiconductor process

Grant US-12209009-B2

United States of America

MEMS device built using the BEOL metal layers of a solid state semiconductor process

Grant US-11780725-B2

United States of America

Mems device built using the BEOL metal layers of a solid state semiconductor process

Grant US-11312617-B2

United States of America

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