High Sensitivity and High S/N Microphone Achieved by PZT Film with Central-Circle Electrode Design

Overview of attention for article published in this source, January 2017

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Mechanically coupled piezoelectric mems microphone

Grant US-12715759-B2

United States of America

Cantilevered piezoelectric microelectromechanical systems microphone with stress…

Grant US-12570520-B2

United States of America

Piezoelectric MEMS microphone with spring region

Grant US-12513470-B2

United States of America

Method of making mems microphone with an anchor

Grant US-12495260-B2

United States of America

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