We present the fabrication and characterizations of novel electrical interconnect test lines made of a Cu/graphite bishell composite with the graphite cap layer grown by electron cyclotron resonance chemical vapor deposition. Through this technique, conformal multilayer graphene can be formed on the predeposited Cu interconnects under CMOS-friendly conditions. The low-temperature (400 °C) deposition also renders the process unlimitedly scalable. The graphite layer can boost the current-carrying capacity of the composite structure to 10(8) A/cm(2), more than an order of magnitude higher than that of bare metal lines, and reduces resistivity of fine test lines by ∼10%. Raman measurements reveal that physical breakdown occurs at ∼680-720 °C. Modeling the current vs voltage curves up to breakdown shows that the maximum current density of the composites is limited by self-heating of the graphite, suggesting the strong roles of phonon scattering at high fields and highlighting the significance of a metal counterpart for enhanced thermal dissipation.
This research output has an Altmetric Attention Score of 4. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 29 November 2022.
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#6,549,209
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#5,909
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Outputs of similar age
#76,905
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Outputs of similar age from ACS Nano
#133
of 270 outputs
Altmetric has tracked 23,206,358 research outputs across all sources so far. This one has received more attention than most of these and is in the 70th percentile.
So far Altmetric has tracked 13,050 research outputs from this source. They typically receive a lot more attention than average, with a mean Attention Score of 14.4. This one has gotten more attention than average, scoring higher than 53% of its peers.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 307,320 tracked outputs that were published within six weeks on either side of this one in any source. This one has gotten more attention than average, scoring higher than 73% of its contemporaries.
We're also able to compare this research output to 270 others from the same source and published within six weeks on either side of this one. This one is in the 45th percentile – i.e., 45% of its contemporaries scored the same or lower than it.
