Bonding structure and hydrogen content in silicon nitride thin films deposited by the electron cyclotron resonance plasma method

Overview of attention for article published in Thin Solid Films, July 2004

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PECVD of SiBN thin films with low leakage current

Grant US-12451345-B2

United States of America

21 Oct 2025

High purity polysilocarb derived silicon carbide powder

Grant US-12215031-B2

United States of America

04 Feb 2025

Polysilocarb based silicon carbide materials, applications and devices

Grant US-11091370-B2

United States of America

17 Aug 2021

Methods of providing high purity SiOC and SiC materials

Grant US-11014819-B2

United States of America

25 May 2021

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