High temperature millisecond annealing of arsenic implanted silicon

Overview of attention for article published in Solid-State Electronics, June 1990

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patent: 6 patents

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mendeley: 9 Mendeley

So far, Altmetric has seen 6 patents that reference this research output.

Pulsed processing semiconductor heating process using combined heat sources

Grant DE-10392472-B4

Germany

18 Jan 2018

Pulsed processing semiconductor heating methods using combinations of heating sources

Grant US-8837923-B2

United States of America

16 Sep 2014

Pulsed processing semiconductor heating methods and associated system using combinations…

Grant US-8000587-B2

United States of America

16 Aug 2011

Pulsed processing semiconductor heating methods using combinations of heating sources

Grant US-7317870-B2

United States of America

08 Jan 2008

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