Properties of nanocrystalline GaN films deposited by reactive sputtering

Overview of attention for article published in Diamond & Related Materials, August 2003

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So far, Altmetric has seen 8 patents that reference this research output.

Method of manufacturing crystalline material from different materials

Grant US-12548756-B2

United States of America

10 Feb 2026

Method of forming crystalline layer, method of forming a battery half cell

Grant US-12548755-B2

United States of America

10 Feb 2026

Method and apparatus for sputter deposition of target material to a substrate

Grant US-12460300-B2

United States of America

04 Nov 2025

Sputter deposition apparatus and method

Grant US-12385123-B2

United States of America

12 Aug 2025

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