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Atomic layer deposition of hafnium silicate gate dielectric layers

Overview of attention for article published in Journal of Vacuum Science & Technology: Part B, July 2007
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About this Attention Score

  • Above-average Attention Score compared to outputs of the same age (64th percentile)
  • Good Attention Score compared to outputs of the same age and source (79th percentile)

Mentioned by

patent
3 patents

Readers on

mendeley
18 Mendeley
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Article details
Title
Atomic layer deposition of hafnium silicate gate dielectric layers
Published in
Journal of Vacuum Science & Technology: Part B, July 2007
DOI 10.1116/1.2713115
Authors

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Timeline Attention over time Attention Score history
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Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 18 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Geographical breakdown
Country Count As %
Taiwan 1 6%
Unknown 17 94%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Researcher 6 33%
Student > Ph. D. Student 5 28%
Student > Master 3 17%
Student > Doctoral Student 1 6%
Student > Bachelor 1 6%
Other 1 6%
Unknown 1 6%
Readers by discipline
Readers by discipline Count As %
Materials Science 6 33%
Engineering 4 22%
Physics and Astronomy 3 17%
Chemistry 3 17%
Chemical Engineering 1 6%
Other 0 0%
Unknown 1 6%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 6. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 22 September 2015.
All research outputs
#7,582,403
of 34,364,397 outputs
Outputs from Journal of Vacuum Science & Technology: Part B
#1,031
of 9,674 outputs
Outputs of similar age
#26,476
of 116,073 outputs
Outputs of similar age from Journal of Vacuum Science & Technology: Part B
#7
of 59 outputs
Altmetric has tracked 34,364,397 research outputs across all sources so far. This one has received more attention than most of these and is in the 73rd percentile.
So far Altmetric has tracked 9,674 research outputs from this source. They receive a mean Attention Score of 4.3. This one has gotten more attention than average, scoring higher than 70% of its peers.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 116,073 tracked outputs that were published within six weeks on either side of this one in any source. This one has gotten more attention than average, scoring higher than 64% of its contemporaries.
We're also able to compare this research output to 59 others from the same source and published within six weeks on either side of this one. This one has done well, scoring higher than 79% of its contemporaries.