Electrohydrodynamic atomization deposition of PZT sol–gel slurry and sol infiltration on the films

Overview of attention for article published in Journal of the European Ceramic Society, July 2012

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Preparation method of composite PZT piezoelectric film based on sol-gel method and electro…

Grant CN-111725385-B

China

12 Apr 2022

Preparation method of composite PZT piezoelectric film based on sol-gel method and electro…

Application CN-111725385-A

China

29 Sep 2020

Method of manufacturing ferroelectric thin film

Grant US-9017770-B2

United States of America

28 Apr 2015

METHOD OF MANUFACTURING FERROELECTRIC THIN FILM

Application US-20150064359-A1

United States of America

05 Mar 2015

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