On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles

Overview of attention for article published in Nanotechnology, August 2014

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On the formation of the porous structure in nanostructured a-Si coatings deposited by dc http://t.co/vuLj406LPH #ICMSEPub #coatings

On the formation of the porous structure in nanostructured a-Si coatings deposited by dc http://t.co/N16t0tow21 #ICMSEPub #Nanostructure

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