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Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller

Overview of attention for article published in IEEE Transactions on Automation Science and Engineering, September 2013
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About this Attention Score

  • Above-average Attention Score compared to outputs of the same age (63rd percentile)
  • Above-average Attention Score compared to outputs of the same age and source (58th percentile)

Mentioned by

patent
1 patent
facebook
1 Facebook page

Readers on

mendeley
9 Mendeley
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Article details
Title
Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller
Published in
IEEE Transactions on Automation Science and Engineering, September 2013
DOI 10.1109/tase.2013.2280618
Authors

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Timeline Attention over time Attention Score history
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Activity
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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 9 Mendeley readers of this research output. Click here to see the associated Mendeley record.
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Geographical breakdown

Geographical breakdown
Country Count As %
Unknown 9 100%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Student > Ph. D. Student 4 44%
Researcher 1 11%
Student > Master 1 11%
Student > Doctoral Student 1 11%
Professor 1 11%
Other 0 0%
Unknown 1 11%
Readers by discipline
Readers by discipline Count As %
Engineering 4 44%
Business, Management and Accounting 1 11%
Decision Sciences 1 11%
Neuroscience 1 11%
Materials Science 1 11%
Other 0 0%
Unknown 1 11%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 4. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 15 June 2021.
All research outputs
#10,531,462
of 31,346,776 outputs
Outputs from IEEE Transactions on Automation Science and Engineering
#171
of 625 outputs
Outputs of similar age
#81,632
of 233,228 outputs
Outputs of similar age from IEEE Transactions on Automation Science and Engineering
#4
of 12 outputs
Altmetric has tracked 31,346,776 research outputs across all sources so far. This one has received more attention than most of these and is in the 65th percentile.
So far Altmetric has tracked 625 research outputs from this source. They receive a mean Attention Score of 4.5. This one has gotten more attention than average, scoring higher than 71% of its peers.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 233,228 tracked outputs that were published within six weeks on either side of this one in any source. This one has gotten more attention than average, scoring higher than 63% of its contemporaries.
We're also able to compare this research output to 12 others from the same source and published within six weeks on either side of this one. This one has gotten more attention than average, scoring higher than 58% of its contemporaries.