Gray-scale photolithography using microfluidic photomasks

Overview of attention for article published in Proceedings of the National Academy of Sciences of the United States of America, February 2003

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In the top 25% of all research outputs scored by Altmetric
High Attention Score compared to outputs of the same age (87th percentile)
Above-average Attention Score compared to outputs of the same age and source (56th percentile)

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patent: 117 patents

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So far, Altmetric has seen 117 patents that reference this research output.

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Grant US-12391979-B2

United States of America

19 Aug 2025

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