Improved manufacturability and characterization of a corrugated Parylene diaphragm pressure transducer

Overview of attention for article published in Journal of Micromechanics & Microengineering, June 2006

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patent: 6 patents

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So far, Altmetric has seen 6 patents that reference this research output.

Magnetoelastically actuated MEMS device and methods for its manufacture

Grant US-10510945-B1

United States of America

17 Dec 2019

Microfabricated magnetostrictive resonator

Grant US-10260969-B1

United States of America

16 Apr 2019

Electrodeposition processes for magnetostrictive resonators

Grant US-10215648-B1

United States of America

26 Feb 2019

Electrodeposition processes for magnetostrictive resonators

Grant US-10132699-B1

United States of America

20 Nov 2018

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