Tribology Issues and Opportunities in MEMS

Table of Contents

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   Book Overview
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   Chapter 1 MEMS R&D in Europe
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   Chapter 2 Integrated MEMS in Conventional CMOS
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   Chapter 3 Facilitating Choices of Machining Tools and Materials for ‘Miniaturization Science’: A Review
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   Chapter 4 Microfabrication Technologies for High Performance Microactuators
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   Chapter 5 Surface Characterization of Non-Lithographic Micromachining
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   Chapter 6 Biosensors and Microfluidic Systems
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   Chapter 7 Power MEMS Materials and Structures
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   Chapter 8 MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization
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    Chapter 9 New Technology and Applications at Lucas NovaSensor
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    Chapter 10 Rough Surface Characterization
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    Chapter 11 Frictional Instabilities
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    Chapter 12 Wear of Ceramics and Metals
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    Chapter 13 Mechanics of Wear: From Conventional Components to MEMS
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    Chapter 14 Rheological Modeling of Thin Film Lubrication
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    Chapter 15 Surface Roughness Induced Effects in Hydrodynamic Lubrication
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    Chapter 16 Transition from Elastohydrodynamic to Partial Lubrication
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    Chapter 17 Micro/Nanotribology: State of the Art and Its Applications
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    Chapter 18 Pulsed Force Mode: A new method for characterizing thin silane films by adhesive force measurements
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    Chapter 19 Formation of Nanometer-Scale Contacts to Viscoelastic Materials
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    Chapter 20 Nanotribology of Vapor-Phase Lubricants
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    Chapter 21 The Tribology of Hydrocarbon Surfaces Investigated using Molecular Dynamics
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    Chapter 22 Dual-Axis Piezoresistive AFM Cantilever for Independent Detection of Vertical and Lateral Forces
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    Chapter 23 Statistical Thermodynamic Treatment of the AFM Tip in Liquid
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    Chapter 24 Tribological Issues of Polysilicon Surface-Micromachining
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    Chapter 25 Advantages and Limitations of Silicon as a Bearing Material for MEMS Applications
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    Chapter 26 Surface Force Induced Failures in Microelectromechanical Systems
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    Chapter 27 Development, Fabrication and Testing of a Multi-Stage Micro Gear System
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    Chapter 28 Analysis of Gear Tooth Performance of Mechanically-Coupled, Outer-Rotor Polysilicon Micromotors
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    Chapter 29 Micro/Nanotribological Studies of Single-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices
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    Chapter 30 Phase Transformations in Semiconductors Under Contact Loading
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    Chapter 31 Influence of Water Adsorption on Microtribology of Micromachines
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    Chapter 32 Tribological Effects of Surface Roughness in MEMS Devices
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    Chapter 33 Active Friction Control Using Ultrasonic Vibration
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    Chapter 34 Contact Resistance Measurements and Modeling of an Electrostatically Actuated Microswitch
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    Chapter 35 Metrology for MEMS Tribology
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    Chapter 36 Mechanical Property Determination Using Nanoindentation Techniques
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    Chapter 37 Stress in Thin Films for MEMS Actuators
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    Chapter 38 Reliability and Fatigue Testing of MEMS
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    Chapter 39 Surface Modification and Mechanical Properties of Bulk Silicon
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    Chapter 40 Microfriction and Microwear Experiments on Metal Containing Amorphous Hydrocarbon Hard Coatings Using an Atomic Force Microscope
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    Chapter 41 Formation of Carbon Films on Ceramic Carbides by High Temperature Chlorination
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    Chapter 42 Deposition and Characterization of Diamond-Like Materials
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    Chapter 43 Wear and Nanomechanical Studies of Silicon Oxide and Silicon Nitride Thin Films for MEMS Applications
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    Chapter 44 a-SiC Thin Films Deposited Using Pulsed Laser Ablation of Graphite and Magnetron Sputtering of Silicon onto Steel Substrates at Room Temperature
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    Chapter 45 Lubrication of Polysilicon Micromechanisms with Alkylsiloxane Self-Assembled Monolayers: Coefficient of Static Friction Measurements
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    Chapter 46 Tribological Properties of Modified MEMS Surfaces
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    Chapter 47 Breakout Session Report:Tribology Research in MEMS
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    Chapter 48 Breakout Session Report: Mechanisms of Nano-Scale Tribology and Instrumentation for MEMS Devices
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    Chapter 49 Breakout Session Report: Lubricants, Overcoats and Surface Modification Techniques
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    Chapter 50 Breakout Session Report: Mechanical Property Measurements
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    Chapter 51 Panel Discussion Report: Tribology Issues and Opportunities in MEMS