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A novel self-aligned T-shaped gate process for deep submicron Si MOSFET's fabrication

Overview of attention for article published in IEEE Electron Device Letters, January 1998
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  • In the top 25% of all research outputs scored by Altmetric
  • High Attention Score compared to outputs of the same age (93rd percentile)
  • High Attention Score compared to outputs of the same age and source (85th percentile)

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