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A double-exposure technique to macroscopically control submicrometer linewidths in positive resist images

Overview of attention for article published in IEEE Transactions on Electron Devices, August 2005
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2 patents

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1 Mendeley
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Article details
Title
A double-exposure technique to macroscopically control submicrometer linewidths in positive resist images
Published in
IEEE Transactions on Electron Devices, August 2005
DOI 10.1109/t-ed.1978.19101
Authors

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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 1 Mendeley reader of this research output. Click here to see the associated Mendeley record.
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Geographical breakdown

Geographical breakdown
Country Count As %
Unknown 1 100%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Researcher 1 100%
Readers by discipline
Readers by discipline Count As %
Physics and Astronomy 1 100%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 3. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 16 March 1988.
All research outputs
#9,874,037
of 28,854,807 outputs
Outputs from IEEE Transactions on Electron Devices
#1,790
of 6,787 outputs
Outputs of similar age
#30,287
of 78,185 outputs
Outputs of similar age from IEEE Transactions on Electron Devices
#150
of 535 outputs
Altmetric has tracked 28,854,807 research outputs across all sources so far. This one is in the 41st percentile – i.e., 41% of other outputs scored the same or lower than it.
So far Altmetric has tracked 6,787 research outputs from this source. They receive a mean Attention Score of 4.0. This one is in the 6th percentile – i.e., 6% of its peers scored the same or lower than it.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 78,185 tracked outputs that were published within six weeks on either side of this one in any source. This one is in the 11th percentile – i.e., 11% of its contemporaries scored the same or lower than it.
We're also able to compare this research output to 535 others from the same source and published within six weeks on either side of this one. This one is in the 1st percentile – i.e., 1% of its contemporaries scored the same or lower than it.