Method and system for detecting and correcting problematic advanced process control… Grant US-10295993-B2 United States of America 21 May 2019
Advanced process control system and method utilizing virtual metrology with reliance index Grant US-8688256-B2 United States of America 01 Apr 2014
METHOD AND SYSTEM FOR DETECTING AND CORRECTING PROBLEMATIC ADVANCED PROCESS CONTROL… Application US-20130060354-A1 United States of America 07 Mar 2013
System and method for implementing a wafer acceptance test (“WAT”) advanced process… Grant US-8108060-B2 United States of America 31 Jan 2012