Polymers having silicon-containing acetal or ketal functional groups Grant US-6479219-B2 United States of America 12 Nov 2002
Polymers having silicon-containing acetal or ketal functional groups Grant US-6359078-B1 United States of America 19 Mar 2002
Silicon-containing alcohols and polymers having silicon-containing tertiary ester groups… Grant US-6358675-B1 United States of America 19 Mar 2002
METHOD OF FORMING FINE RESIST PATTERN IN ELECTRON BEAM OR X-RAY LITHOGRAPHY Grant US-5104772-A United States of America 14 Apr 1992