Determining mean and gradient residual stresses in thin films using micromachined cantilevers

Overview of attention for article published in Journal of Micromechanics & Microengineering, January 1999

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So far, Altmetric has seen 8 patents that reference this research output.

Piezoelectric MEMS device with thermal compensation from one or more compensation layers

Grant US-12649653-B2

United States of America

09 Jun 2026

Acoustic devices with residual stress compensation

Grant US-12568337-B2

United States of America

03 Mar 2026

Piezoelectric MEMS device with thermal compensation from different material thicknesses

Grant US-12404167-B2

United States of America

02 Sep 2025

Materials and methods for conductive thin films

Grant US-11111399-B2

United States of America

07 Sep 2021

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