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Clustered defects in IC fabrication: Impact on process control charts

Overview of attention for article published in IEEE Transactions on Semiconductor Manufacturing, January 1991
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8 Mendeley
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Article details
Title
Clustered defects in IC fabrication: Impact on process control charts
Published in
IEEE Transactions on Semiconductor Manufacturing, January 1991
DOI 10.1109/66.75850
Authors

D.J. Friedman, S.L. Albin

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Timeline Attention over time Attention Score history
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Activity
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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 8 Mendeley readers of this research output. Click here to see the associated Mendeley record.
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Geographical breakdown

Geographical breakdown
Country Count As %
Unknown 8 100%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Other 2 25%
Professor 2 25%
Student > Bachelor 1 13%
Student > Ph. D. Student 1 13%
Student > Postgraduate 1 13%
Other 0 0%
Unknown 1 13%
Readers by discipline
Readers by discipline Count As %
Engineering 4 50%
Computer Science 1 13%
Unknown 3 38%