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Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator

Overview of attention for article published in Journal of Microelectromechanical Systems, January 1999
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  • Good Attention Score compared to outputs of the same age (75th percentile)
  • Average Attention Score compared to outputs of the same age and source

Mentioned by

patent
8 patents

Readers on

mendeley
56 Mendeley
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Article details
Title
Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator
Published in
Journal of Microelectromechanical Systems, January 1999
DOI 10.1109/84.809061
Authors

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Timeline Attention over time Attention Score history
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Activity
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Mendeley demographics

Mendeley demographics

The data shown below were compiled from readership statistics for 56 Mendeley readers of this research output. Click here to see the associated Mendeley record.
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Geographical breakdown

Geographical breakdown
Country Count As %
Taiwan 1 2%
Unknown 55 98%

Demographic breakdown

Readers by professional status
Readers by professional status Count As %
Student > Ph. D. Student 18 32%
Student > Master 10 18%
Researcher 6 11%
Professor > Associate Professor 4 7%
Other 3 5%
Other 7 13%
Unknown 8 14%
Readers by discipline
Readers by discipline Count As %
Engineering 37 66%
Materials Science 5 9%
Physics and Astronomy 2 4%
Agricultural and Biological Sciences 1 2%
Computer Science 1 2%
Other 2 4%
Unknown 8 14%
Attention Score in Context

Attention Score in Context

This research output has an Altmetric Attention Score of 6. This is our high-level measure of the quality and quantity of online attention that it has received. This Attention Score, as well as the ranking and number of research outputs shown below, was calculated when the research output was last mentioned on 14 January 2016.
All research outputs
#7,432,872
of 34,054,827 outputs
Outputs from Journal of Microelectromechanical Systems
#438
of 1,845 outputs
Outputs of similar age
#21,179
of 155,080 outputs
Outputs of similar age from Journal of Microelectromechanical Systems
#8
of 30 outputs
Altmetric has tracked 34,054,827 research outputs across all sources so far. This one has received more attention than most of these and is in the 73rd percentile.
So far Altmetric has tracked 1,845 research outputs from this source. They typically receive a little more attention than average, with a mean Attention Score of 5.8. This one has gotten more attention than average, scoring higher than 51% of its peers.
Older research outputs will score higher simply because they've had more time to accumulate mentions. To account for age we can compare this Altmetric Attention Score to the 155,080 tracked outputs that were published within six weeks on either side of this one in any source. This one has done well, scoring higher than 75% of its contemporaries.
We're also able to compare this research output to 30 others from the same source and published within six weeks on either side of this one. This one is in the 46th percentile – i.e., 46% of its contemporaries scored the same or lower than it.