Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator

Overview of attention for article published in Journal of Microelectromechanical Systems, January 1999

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patent: 8 patents

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So far, Altmetric has seen 8 patents that reference this research output.

DEVICE AND METHOD FOR PRODUCING A DEVICE WITH MICRO- OR NANOSTRUCTURES

Application WO-2016005464-A1

World Intellectual Property Organisation (WIPO)

14 Jan 2016

MEMS device and methods for manufacturing and using same

Grant US-9148075-B2

United States of America

29 Sep 2015

MEMS device and methods for manufacturing and using same

Grant US-8861062-B2

United States of America

14 Oct 2014

Staggered torsional electrostatic combdrive and method of forming same

Grant US-7079299-B1

United States of America

18 Jul 2006

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