Failure mechanisms of TiN thin film diffusion barriers

Overview of attention for article published in Thin Solid Films, October 1988

Altmetric Badge

Mentioned by

patent: 3 patents

Readers on

mendeley: 11 Mendeley

So far, Altmetric has seen 3 patents that reference this research output.

Semiconductor device including interlayer dielectric film layers and conductive film…

Grant US-5459353-A

United States of America

Method for forming a titanium nitride barrier layer

Grant US-5232871-A

United States of America

Process of making titanium nitride barrier layer

Grant US-5175126-A

United States of America

This page shows the most recent patents that mention this research output. Click here to find out how to access more activity.