The BELST II process for a silicon high-aspect-ratio micromaching vertical comb actuator and its applications

Overview of attention for article published in Journal of Micromechanics & Microengineering, November 2003

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So far, Altmetric has seen 6 patents that reference this research output.

MEMS (micro electro mechanical System) micro-mirror structure preparation method and MEMS…

Application CN-121742115-A

China

27 Mar 2026

Device for optical imaging, tracking, and position measurement with a scanning MEMS mirror

Grant US-8427657-B2

United States of America

23 Apr 2013

Gimbal-less micro-electro-mechanical-system tip-tilt and tip-tilt-piston actuators and a…

Grant US-8043513-B2

United States of America

25 Oct 2011

Sensor with position-independent drive electrodes in multi-layer silicon on insulator…

Grant US-7690254-B2

United States of America

06 Apr 2010

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