Deposition of carbon nitride films from single-source s-triazine precursors

Overview of attention for article published in Carbon, January 2003

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Method of forming a nitrogen-containing carbon film and system for performing the method

Grant US-12068154-B2

United States of America

20 Aug 2024

METHOD OF FORMING A NITROGEN-CONTAINING CARBON FILM AND SYSTEM FOR PERFORMING THE METHOD

Application US-20210320003-A1

United States of America

14 Oct 2021

Semiconductor film and method of forming the same

Grant US-10090470-B2

United States of America

02 Oct 2018

Triazine derivative and preparation method thereof as well as new application as…

Grant CN-101885707-B

China

29 Aug 2012

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