A maskless post-CMOS bulk micromachining process and its application

Overview of attention for article published in Journal of Micromechanics & Microengineering, November 2005

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Methods of fabricating MEMS with spacers between plates and devices formed by same

Grant US-8830557-B2

United States of America

09 Sep 2014

Mechanical layer and methods of making the same

Grant US-8659816-B2

United States of America

25 Feb 2014

MEMS devices having support structures with substantially vertical sidewalls and methods…

Grant US-8298847-B2

United States of America

30 Oct 2012

Method of fabricating interferometric devices using lift-off processing techniques

Grant US-7906353-B2

United States of America

15 Mar 2011

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