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| Title |
Critical Parameters of Si Conversion into Si3N4 Nanophase Powder for Plasma Process
|
|---|---|
| Published by |
Trans Tech Publications, May 1998
|
| DOI | 10.4028/www.scientific.net/msf.282-283.57 |
| Authors |
P.Lj. Stefanović, P.B. Pavlovic, Ž.G. Kostić, S. Šikmanović, D. Cvetinović |